Deposition of Diamond-like Carbon films using Dense Plasma Focus
نویسنده
چکیده
Diamond Like Carbon (DLC) films were deposited on quartz substrates using Dense Plasma Focus (DPF) method. The formation of sp bonds as is it’s content in the film strongly depends on the substrate and it seems quartz is not a suitable substrate. However, we report here the formation of DLC films on quartz substrates that were maintained at elevated temperatures and show the content of carbon atoms with sp bonds in the film is directly proportional to the substrate’s temperature. Not only does this give good control of film fabrication, but also shows how to take advantage of DLC film’s anti-wear, scratch resistant properties on material surfaces that require protection. PACs No: 81.05.Uw, 78.55.Qr, 78.20.-e
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